A single link to the first track to allow the export script to build the search page
  • Monday, May 19, 2014
  • Uniformity Improvement for 200 mm APCVD Epitaxial Si Films Enabled by Retrofit of Applied Materials Epi Centura

    • Matthias Künle, Infineon Technologies ;
    • Johannes Baumgartl, Infineon Technologies ;
    • Thomas Ackermann, Applied Materials