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  • Monday, May 19, 2014
  • Using in-line Film Measurement as a Proxy for Device Matching to Speed up Process Change Qualification

    • Chienfan Yu, IBM Systems and Technology ;
    • Raymond Van Roijen, IBM ;
    • Shailesh Shah, IBM Systems and Technology ;
    • Eric Woodard, IBM Systems and Technology ;
    • Javier Ayala, IBM Systems and Technology ;
    • Edward Sziklas, IBM Systems and Technology